PRESSURE SENSOR MODULE FOR SUB-SEA APPLICATIONS Russian patent published in 2016 - IPC G01L13/02 

FIELD: measuring equipment.

SUBSTANCE: invention relates to co-planar differential pressure sensor module. Module comprises a base having a pair of recesses. Differential pressure sensor comprises two of pedestals, where each pedestal is disposed in a respective recess and is coupled to a respective isolation diaphragm. Differential pressure sensor has a sensing diaphragm and two pressure sensing ports. Each port of differential pressure sensor is fluidically coupled to a respective isolation diaphragm. Module also includes circuitry coupled to differential pressure sensor to measure an electrical characteristic of sensor. Pressure sensor module comprises a base with a recess. Pedestal is disposed in recess and is coupled to isolation diaphragm. Circuitry is coupled to pressure sensor to measure an electrical characteristic of sensor that varies with pressure. Base is designed from material which is suitable for submersion into sea water.

EFFECT: high measurement accuracy.

13 cl, 7 dwg