FIELD: test and measurement equipment.
SUBSTANCE: invention relates to test and measurement equipment and is aimed at increasing the accuracy of determining positions of defects on aspherical surfaces of both the second and a higher order during their formation. Device comprises a monochromatic light source, an afocal system, a beam splitter to form the reference and the object branches and a receiving part. In the object branch there are the first focusing lens with a diaphragm in its back focal plane, a synthesized holographic optical element consisting of an axial synthetic hologram-compensator and two coaxial with it adjustment holograms, in the reference branch there is a flat reference mirror fixed perpendicularly to the beams propagating from the beam splitter, in the receiving part there are in series: a rotary flat mirror, the second focusing lens, a photodetector and an information display unit. Herewith in one version the device additionally contains one mark with two crossing each other strokes installed between the beam splitter and the first focusing lens and aligned with an intermediate image of the aspherical surface of the optical part, in another version the device contains two marks, each with two crossing each other strokes, one of which is located between the afocal system and the beam splitter and aligned with the intermediate image of the aspherical surface, and the second mark is located in the receiving part between the flat rotary mirror and the second focusing lens and is aligned with the intermediate image of the aspherical surface of the optical part.
EFFECT: technical result is the increase of accuracy of determining positions of defects on an aspherical surface of an optical part.
4 cl, 4 dwg, 2 tbl
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Authors
Dates
2017-03-13—Published
2015-09-04—Filed