INTERFEROMETER FOR MONITORING TELESCOPIC SYSTEMS AND OBJECTIVE LENSES Russian patent published in 2014 - IPC G01M11/02 G01B9/02 

FIELD: physics.

SUBSTANCE: interferometer has a monochromatic light source and series-arranged afocal system for forming an expanded parallel light beam, a plane-parallel beam splitter oriented at an angle to the parallel light beam, a first plane mirror with a reflecting coating facing the plane-parallel beam splitter and configured to change the angle of inclination to the parallel light beam passing through the plane-parallel beam splitter, a second plane mirror configured to change the angle of inclination, and a recording unit placed in the beam of light reflected successively from the first plane mirror and the plane-parallel beam splitter, and having a focusing lens and a photodetector. The second plane mirror is placed between the afocal system and the plane-parallel beam splitter, and its reflecting coating has low transmission and faces the reflecting coating of the first plane mirror.

EFFECT: high accuracy of monitoring focusing and residual wave aberrations of telescopic systems and objective lenses due to interference of light waves passing through the monitored telescopic system or objective lens multiple times.

2 cl, 3 dwg