FIELD: measurement technology.
SUBSTANCE: invention relates to measurement technology and namely to laser interferometry. The invention can be used to measure the linear displacements of objects with an unknown temperature profile with high accuracy. The laser displacement meter consists of an optically connected and sequentially located unit for the formation of laser radiation, a non-polarizing beam splitter, two corner reflectors of the reference and measuring arms, a receiving device and an electronic computing unit. The device uses a radiation source with two wavelengths, a piezo actuator with pseudo-random excitation is additionally installed on the corner reflector of the reference arm, and a spectral beam splitter is installed in front of the receiving device. The receiving device is made in the form of two nodes, each of which consists of a polarizing beam splitter and two photodetectors.
EFFECT: invention provides possibility of simplifying the measurement and reduces requirements for conditions of their conduct.
1 cl, 1 dwg
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Authors
Dates
2021-02-09—Published
2020-06-08—Filed