HOLDER FOR PLACING AND PROTECTING THE SIDE OF THE PHOTOMASK OR PHOTOMASK WITH A MEMBRANE RELATIVE TO THE CLEANING MEDIUM, A METHOD FOR CLEANING THE PHOTOMASK OR PHOTOMASK WITH A MEMBRANE AND A DEVICE FOR OPENING AND CLOSING Russian patent published in 2021 - IPC G03F7/20 

FIELD: photographic processes.

SUBSTANCE: invention relates to a holder for placing and protecting the side of a photomask or a photomask with a membrane relative to a cleaning medium, to a method for cleaning the side of a photomask or a photomask with a membrane, as well as to a device for opening and closing a holder of the previously specified type. The claimed holder (1) has a base with at least three supporting elements (15), which are located at a distance from the bottom (9) of the base to accommodate and hold a photomask or a photomask with a membrane, as well as a sealing frame (7, 20, 21) with top side (24) and bottom side (25), and the lower side is made with the possibility of mounting on the base, and the sealing frame has a central hole (26), which is designed in such a way that it can accommodate a photomask with a gap. On the sealing frame, a circular elastic sealing element (22) is provided, which from the inner perimeter of the central hole obliquely to the upper side of the sealing frame with an inclination enters the central hole, and the sealing element in the unloaded state has an inner perimeter that is smaller than the outer perimeter of the photomask, and in the loaded state comes into contact with the photomask placed in the central hole in a circle on the side edge.

EFFECT: technical result is the capability to protect the side of the photomask on which the membrane is located from the cleaning medium, while the other side is being cleaned with the same cleaning medium.

33 cl, 19 dwg