METHOD FOR MEASURING LOW ABSOLUTE GAS PRESSURE AND DEVICE FOR ITS IMPLEMENTATION Russian patent published in 2021 - IPC G01L21/00 G01L7/06 

FIELD: measuring equipment.

SUBSTANCE: invention relates to measuring equipment and can be used to measure low absolute pressure of gas or gas mixtures. In the proposed method for measuring low absolute gas pressure, mechanical self-oscillations of given amplitude of a thin oscillator plate mounted on an elastic mechanical suspension are created in a plane-parallel plane with a given gap between two other fixed plates, the natural frequency of self-oscillations of the oscillator plate is measured once in the maximum achievable vacuum. Then the space in the gaps between the plates is filled with the measured gas and the self-oscillation frequency of the oscillator plate is measured, the pressure of the gas under study is calculated from the measured values of the self-oscillation natural frequency of the oscillator plate. Moreover, the measurement of the natural frequency of self-oscillations is performed by measuring the instantaneous values of the electrical capacitance formed between the oscillator plate and one of the fixed plates. In this case, the frequency of change in electrical capacitance is taken to be equal to the natural frequency of self-oscillations of the oscillator plate. The device that implements the method contains an oscillator plate, two flat electrodes, voltage source, unit for measuring the position of the oscillator plate, a control unit and a frequency meter. In this case, the plate-oscillator and two flat electrodes are simultaneously connected to the unit for measuring the position of the plate-oscillator and to a voltage source, which is controlled by the control unit in proportion to the signals coming from the unit for measuring the position of the plate-oscillator, and the frequency meter is connected to the control unit.

EFFECT: invention increases accuracy of measurements, expanding functionality and reducing the duration of measurements.

2 cl, 3 dwg