FIELD: plasma technology.
SUBSTANCE: device for generation of high-nonequilibrium low-temperature plasma of pulsed gas discharges at atmospheric and low pressure includes a solid-state pulse generator with a current sensor, a discharge oscillating circuit receiving energy from said generator, as well as a control computer device for controlling energy input into the discharge circuit in the form of short pulses by independent and dynamic frequency control and pulse ratio of power pulses supply to load through impact excitation circuit based on data received by feedback from said current sensors. Regulation of energy input is performed so that to permanently maintain stable plasma parameters. Also disclosed is a method of generating a high-nonequilibrium low-temperature plasma of pulsed gas discharges at atmospheric and / or low pressure using an apparatus according to the invention.
EFFECT: possibility to control properties of medium in treatment zone at reduced power consumption.
17 cl, 6 dwg
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