HOLOGRAPHIC NANO-LENGTH GAGE Russian patent published in 2022 - IPC G01B5/02 

FIELD: measuring equipment.

SUBSTANCE: invention relates to measuring equipment, in particular to devices for measurement of linear sizes of objects with photoelectrical converters based on diffraction gratings; it can be used in mechanical engineering, optical and mechanical and aerospace industries, nano-industry. A holographic nano-length gage contains a case, a measuring grating with streaks on substrate, rigidly fixed in the case, and a glass guide rail rigidly attached to the end of the grating, a reading head consisting of an indicator grating with streaks on substrate, an illuminator, a lens, photodetectors. The reading head is connected to a measuring rod with a tip, is connected to a movement drive, and is made with the possibility of movement along the axis of the measuring grating and along the glass guide rail, using supports in the form of two nodes with bearings, rigidly attached to the reading head, designed for parallel movement of the indicator grating relatively to the measuring grating with a constant gap between their base surfaces. The first node of supports provides movement of the reading head along the measuring grating, and the second node of supports provides movement of the reading head along the glass guide rail.

EFFECT: expansion of the range of measurement of linear sizes of an object to 500 mm, while saving nano-accuracy of measurements in the entire measured range, which expands the field of application of a device.

1 cl, 4 dwg