FIELD: vacuum deposition chamber.
SUBSTANCE: chamber contains at least one door fastened through a cylindrical hinge and a traverse with movable cylindrical consoles, each of which is mounted in two spatially spaced linear bearings. Each of the bearings is installed in a housing mounted on a base common with the housings of other bearings, fastened to the chamber through a stainless steel element.
EFFECT: increased accuracy and ease of movement of the door with technological equipment installed on it.
8 cl, 7 dwg
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Authors
Dates
2023-10-06—Published
2023-05-03—Filed