PIEZOELECTRIC ACTUATOR MANUFACTURING METHOD Russian patent published in 2024 - IPC H10N30/05 

FIELD: electricity.

SUBSTANCE: invention relates to production of devices based on piezoelectric materials, namely axially symmetric piezoelectric actuators of cylindrical (membrane) type of execution of controlled axial radial movements for use in micromechanics, controlled optics, sensor equipment, acoustics, in particular, in the manufacture of piezoelectric acoustic elements – sensors and emitters. When making a cylindrical piezoelectric actuator, two continuous current-conducting coatings are applied on the upper and lower surfaces of the thin piezoelectric layer with formation of two electrodes of double-wire current-conducting line interacting through the layer, wherein crosswise polarization of the layer is performed by applying appropriate polarizing voltage to the electrodes. At that, a composite tape is formed from two non-interconnected extended flexible piezoelectric tape-type actuators with mutually inverse directions of polarization of layers along the thickness, then, composite tape is rolled up with application of interlayer adhesive interlayers between outer and inner current-conducting coatings of composite tape contacting during winding. As a result, a monolithic cylindrical piezoelectric actuator is formed, which includes conjugated piezoelectric layers in the form of spirals with alternation of mutually inverse polarisations of the layers along the radial coordinate, spiral electrodes and adhesive interlayers between electrodes. Cylindrical piezoelectric actuator can be cut along cross sections into thin discs to form membrane piezoelectric actuators with spirals of interacting electrodes for installation on the upper and/or lower surfaces of the working elastic membrane.

EFFECT: increasing the efficiency of the created actuator by increasing the ratio of the amplitude of axial movements of the working sections of the piezoelectric actuator to the values of the applied control voltage.

5 cl, 4 dwg