FIELD: electronic engineering. SUBSTANCE: pump that has magnetic system and sealed case with axisymmetric evacuation pipe as well as cathode built up of flat titanium plates and anode assembled of a number of cylindrical cells abutting against hollow cylinder placed around evacuation pipe, both arranged axis-symmetrically within case, is provided, in addition, with one more cathode made in the form of hollow getter metal cylinder coaxially arranged inside hollow cylinder of anode; clearance between positive cathode and hollow cylinder of anode is 0.5-0.7 of anode cell diameter. Operating pressure range is extended from 2•10-1 to 5•10-9 Pa. EFFECT: improved speed of inert gas evacuation, eliminated argon instability, and enlarged operating pressure range.
Title | Year | Author | Number |
---|---|---|---|
MAGNETIC DISCHARGE CELL | 0 |
|
SU930432A1 |
MAGNETIC DISCHARGE PUMP | 0 |
|
SU775791A1 |
MAGNETIC DISCHARGE PUMP | 0 |
|
SU1088091A1 |
ION-GETTER PUMP | 0 |
|
SU1102408A1 |
MAGNETIC DISCHARGE PUMP | 0 |
|
SU642797A1 |
MAGNETIC DISHARGE PUMP | 0 |
|
SU1351465A1 |
PENNING PUMP | 2015 |
|
RU2603348C2 |
MAGNETIC DISCHARGE PUMP | 0 |
|
SU1091254A1 |
0 |
|
SU499611A1 | |
MAGNETIC DISCHARGE PUMP | 0 |
|
SU930433A1 |
Authors
Dates
1998-12-20—Published
1983-05-13—Filed