FIELD: measurement technology. SUBSTANCE: interferometer has laser, unit of dishes with working and test dishes, one interference channel, provided with a photodetector at it output, control unit and detection unit. Two additional interference channels are introduced in the device which are tracking changes in sizes of the dishes. EFFECT: improved precision of measurement under effect of intensive temperatures. 3 dwg
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Authors
Dates
1994-05-30—Published
1987-08-10—Filed