FIELD: piezotechnology. SUBSTANCE: strip piezoelement has piezoelectric plate 1 of AT cut of rectangular shape on which main faces exciting electrodes 2 and 3 are positioned. Presence of rectangular grooves 4 and 5 in piezoelectric plate 1 located on opposite main faces in symmetry to piezomechanical axis Z provides for reflection of part of energy and for its localization in underelectrode region which results in increased durability of piezoelement. Depth of grooves is selected equal to half-thickness of plate. That is why cutting of grooves and contouring of piezoelectric plate 1 is executed by means of photolithography in one operation. This contributes to facilitated manufacture of piezoelement. EFFECT: increased durability and facilitated manufacture of strip piezoelement. 2 dwg
Title | Year | Author | Number |
---|---|---|---|
PIEZOID | 1992 |
|
RU2032252C1 |
0 |
|
SU1780144A1 | |
PIEZOELECTRIC RESONATOR | 1994 |
|
RU2107987C1 |
PIEZOID OF PIEZOELECTRICAL RESONATOR | 0 |
|
SU1737703A1 |
STRIP PIEZOELEMENT OF THICKNESS-SHEAR MODES AND PROCESS OF ITS MANUFACTURE | 1992 |
|
RU2007023C1 |
PIEZOELECTRIC CAVITY | 1992 |
|
RU2047267C1 |
PIEZOELECTRIC RESONATOR | 0 |
|
SU1827710A1 |
0 |
|
SU1780147A1 | |
PIEZOELECTRIC RESONATOR | 2003 |
|
RU2246791C1 |
MONOLITHIC QUARTZ FILTER | 2006 |
|
RU2329592C2 |
Authors
Dates
1994-01-30—Published
1989-11-14—Filed