EXTENDED ELECTRIC ARC EVAPORATOR OF METALS Russian patent published in 1994 - IPC

Abstract SU 1802550 A1

FIELD: application of coatings in vacuum. SUBSTANCE: cathode made from individual electrically-insulated sections consisting from various materials included into multilayer coating ensures the use of one group of anodes for evaporation of material from the surface of various cathode sections. The mechanism for horizontal propulsion of cathode sections provides for disposition of only one cathode section between the anodes. This ensures the same conditions for settling of the evaporated flux from various cathode section on the backing. EFFECT: improved design. 2 cl, 2 dwg

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SU 1 802 550 A1

Authors

Ehsterlis M.Kh.

Bulat V.E.

Gruich D.D.

Kirson P.F.

Abdulov A.V.

Dates

1994-12-15Published

1987-05-28Filed