DEVICE FOR INSPECTING DEFLECTION OUT OF LINEARITY Russian patent published in 1994 - IPC

FIELD: test equipment. SUBSTANCE: device has a mark made in form of two mirrors mounted rigidly at an angle of 90 deg. one to the other, optical registering unit made in form of a casing. Laser radiation source and collimator are installed inside the casing. Collimator is made in form of a telescopic system. Radial non-transparent plate is mounted onto optical axis of collimator. The first mirror corresponding to beam path is made to be transparent, it disposed at an angle of 45 deg. to the axis of laser beam. The second complete reflection mirror is installed along the beam path behind the first one. Both mirrors are rigidly mounted onto the slider. The latter is mounted for movement along the guides by means of micrometer screw. Analyzer is mounted onto the slider. EFFECT: improved precision of measurement. 2 dwg