PRESSURE MICROSENSOR Russian patent published in 1994 - IPC

Abstract RU 2010195 C1

FIELD: measurement technology. SUBSTANCE: sensitive element of pressure microsensor presents membrane and base manufactured from one semiconductor starting material by making thinnings in cylindrical or cubic blank. Measurement and amplification circuits are formed on membrane and side surface of cylinder or cube accordingly. EFFECT: enhanced sensitivity, reduced mass and size characteristics. 2 dwg

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RU 2 010 195 C1

Authors

Egiazarjan Eh.L.

Dates

1994-03-30—Published

1991-11-20—Filed