MICROELECTRONIC DIFFERENTIAL PRESSURE SENSOR AND METHOD OF ITS MANUFACTURE Russian patent published in 1998 - IPC

Abstract RU 2107272 C1

FIELD: measurement technology. SUBSTANCE: membrane 2 is secured in sensor body 1. It divides body into two spaces: overmembrane 6 and undermembrane 4 spaces coupled to delivery capillary channels. Spaces 6 and 4 and capillary channels are filled with buffer liquid, which allows undistorted transmission of measured medium pressure to sensor membrane 2 without losses. EFFECT: higher measurement results. 2 cl, 5 dwg

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RU 2 107 272 C1

Authors

Egiazarjan Ehduard Ljudvikovich

Dates

1998-03-20Published

1994-11-03Filed