METHOD OF DETERMINATION OF CHARACTERISTICS OF ION-OPTICAL SYSTEMS Russian patent published in 1994 - IPC

FIELD: optics. SUBSTANCE: probing beam of long-life excited ions emitting optical radiation with cross-section diameter d which is more than an order less than diameter D of aperture of ion-optical system is passed through investigated ion-optical system. In front of input to ion-optical system beam is displaced periodically in parallel to optical axis of ion-optical system within limits of aperture to fixed distance in compliance with law given in description of invention. Relative positions of major elements are obtained by simultaneous registration of visualized trajectories of probing beam. EFFECT: enhanced sensitivity, accuracy and informativeness of method thanks to direct measurement of major elements and aberration characteristics of ion-optical system. 2 dwg