SECONDARY-ION MASS SPECTROMETER Russian patent published in 1994 - IPC

FIELD: experimental physics. SUBSTANCE: spectrometer has vacuum system, dual-channel burst mass analyzer with channels, and ion sources arranged symmetrically on it. First beam of ions shaped by source is passed through one of lens channels to specimen secured within reach of second channel. Secondary ions are stretched by electrostatic grid and go to channel. Ports are made of quartz glass. Optical radiation built up when specimen is bombarded by ions is recorded in the form of currents coming from photomultiplier. EFFECT: enlarged functional capabilities. 2 dwg