SECONDARY-ION ENERGY AND MASS SPECTROMETER Russian patent published in 1994 - IPC

FIELD: instruments for diagnosis of surfaces by ion beams to determine chemical and element composition of surface layers of metals and semiconductors. SUBSTANCE: device incorporates unique organization of two ion-optic channels where same elements of ion-optic system are used for different measurements at input and output of 180 deg. energy analyzer; 90 deg. deflectors and two electrostatic lenses are additionally introduced. Spectrometer may be found useful for energy and mass analyses of ion beams. EFFECT: enlarged functional capabilities, reduced time required for analysis, improved validity of results. 5 dwg