APPARATUS FOR ANALYZING THE ENERGY SPECTRUM OF PLASMA IONS Russian patent published in 2020 - IPC H01J49/48 

FIELD: measurement.

SUBSTANCE: invention relates to measurements in plasma physics and charged particle physics. Device for analyzing the energy spectrum of plasma ions comprises a vacuum chamber with a target, into which, by means of an optical window and a lens, a laser beam is fixed, a transit tube connected to it along the axis of expansion, electrostatic cylindrical analyzer of energy spectrum of ions and detector of charged particles (SEM) with load resistance, voltage from which is entered to input of oscillograph, and to the second input laser image reference signal is entered. Between the drift pipe and the analyzer, an electrode system is placed, which includes two electrodes under ground potential, and the third electrode isolated from them and arranged symmetrically between them under negative potential -V.

EFFECT: high accuracy of detecting the energy spectrum of the ion flux and subsequent measurement of the ion flux.

1 cl, 2 dwg