METHOD FOR STARTING TURBOMOLECULAR VACUUM UNIT Russian patent published in 1994 - IPC

Abstract RU 2016254 C1

FIELD: vacuum technology. SUBSTANCE: unit has aerostatic bearings of rotors of turbomolecular and molecular stages. Rotors of the turbomolecular and molecular stages are accelerated simultaneously, the load current of a frequency converter is controlled. The frequency converter controls a turbomolecular stage motor. When the load current value reaches the maximum allowable value the acceleration of the turbomolecular stage rotor is stopped, when the load current drop stops the turbomolecular stage rotor is accelerated again. EFFECT: improved efficiency and reduced starting time. 1 dwg

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RU 2 016 254 C1

Authors

Vikhrev V.I.

Novikov N.M.

Sergeev V.P.

Sholokhov V.B.

Dates

1994-07-15—Published

1990-01-30—Filed