FIELD: pumps. SUBSTANCE: when compressed air is fed a rotor floats up. The pump is energized, the gas is evacuated from the sucked volume into an annular groove. The pressure below atmospheric is produced on a molecular-viscous stage due to a viscous stage, that is, the evacuated gas freely passes through channels of molecular stage 6. EFFECT: improved structure. 6 cl, 1 dwg
Title | Year | Author | Number |
---|---|---|---|
MOLECULAR VACUUM PUMP | 1998 |
|
RU2168070C2 |
METHOD FOR STARTING TURBOMOLECULAR VACUUM UNIT | 1990 |
|
RU2016254C1 |
SINGLE-FLOW FOUR-STAGE TURBOMOLECULAR PUMP | 2014 |
|
RU2560133C1 |
TURBOMOLECULAR PUMP WITH SINGLE-FLOW TURBOMOLECULAR FLOW PART | 2012 |
|
RU2490519C1 |
TURBOMOLECULAR VACUUM PUMP | 0 |
|
SU1459352A1 |
TURBOMOLECULAR VACUUM PUMP | 1991 |
|
RU2014510C1 |
TWO-FLOW TURBOMOLECULAR VACUUM PUMP WITH HYBRID AIR-GAS CHANNELS | 2014 |
|
RU2543917C1 |
MILLING HEAD | 1991 |
|
RU2016715C1 |
COMBINED TURBOMOLECULAR PUMP | 1995 |
|
RU2105905C1 |
METHOD OF EVACUATION OF GASES AND VACUUM PUMP FOR REALIZATION OF THIS METHOD | 1994 |
|
RU2079000C1 |
Authors
Dates
1994-07-15—Published
1990-08-23—Filed