FIELD: inspection of semiconductor devices. SUBSTANCE: information enters the line in form of packs of harmonic oscillations, which are formed by circuit made of register, analog-to-digital converter and lower frequency filter; all the units are connected in series. Information which goes out of line in the same form is converted (decoded) by small-digit analog-to-digital converter. EFFECT: improved reliability. 3 cl, 11 dwg
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Authors
Dates
1994-09-15—Published
1991-12-04—Filed