FIELD: measurement technology. SUBSTANCE: device is meant for use in equipment of probe inspection of microelectronic structures. It includes microscope, drive, probe head, object table and cryostat. Cryostat is manufactured in the form of two intercommunicating thermally insulated chambers. First one houses heater, second one carries probe head. Second chamber is composed of cap rigidly attached to tube holder of microscope and base which has duct to discharge gases, hole to mate with object table with drive and spring-loaded sealing ring. EFFECT: expanded operational capabilities. 2 dwg
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