FIELD: physics.
SUBSTANCE: probe assembly for use in a scanning probe microscope has a carrier having a plurality of at least three identical probes and an addressing means. Each probe has a resilient supporting beam and a tip which is located on a plane which is common to the plurality of probe tips and which is movable relative the plane. The addressing means has at least one additional layer deposited on the supporting beam, the additional layer being formed from a material which is different from that of the supporting beam, thereby forming a multilayered structure comprising at least two layers with differing thermal expansion. The addressing means is adapted to select one of the plurality of probes for relative movement with respect to a majority of the remainder of the probes by heating the multilayered material using a remote light source.
EFFECT: faster replacement of probes, simple design of the device.
29 cl, 8 dwg
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