DEVICE TO FORM NANO-SIZED OBJECTS Russian patent published in 2008 - IPC B82B3/00 

FIELD: machine building.

SUBSTANCE: invention relates to devices intended to form nano-sized objects. In compliance with this invention the device to form nano-sized objects incorporates a working chamber accommodating a microscope stage and a measuring head of the scanning probe microscope head, the said microscope including a cantilever, a source of electrical effects onto the cantilever/sample system, piezo scanners with thermal drift and deformation compensator, anti-vibration devices, a digital electronic probe scanning microscope head control system and the data analogue-digital processing system. The aforesaid source of electrical effects on the cantilever/sample system represents an electronic current control device operating in both a direct current and pulsed current modes, including a variable-polarity mode. Note that the device incorporates additionally an electronic voltage amplitude and its derivative control system carrying out the control during the entire object formation process, an independent sample and chamber temperature adjustment and stabilisation system, reagents and their evaporators sources, as well as the system of barbotage, control, adjustment and stabilisation of humidity, that of the gas medium evacuation from the chamber working space isolated from the working chamber vibration noises by means of shutter and a bypass system.

EFFECT: higher system mobility and reproducibility of nano-elements formation processes.