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2 024 534

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IPC

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Application

5021883/04, 1991-12-04

(22)

Actual filing date

1991-12-04

(45)

Published

1994-12-15

(72)

Inventor

Grinberg E.E.Nozdrja S.M.Nechaeva G.Ju.Shmelev L.V.Khangazheev S.Kh.

(73)

Holder

Nauchno-Issledovatel'Skij Institut Khimicheskikh Reaktivov I Osobo Chistykh Khimicheskikh Veshchestv Ob"Edinenie

METHOD OF SYNTHESIS OF BIS-(TRIMETHYLSILYL) -AMINOTRIALKOXYGERMANIUM Russian patent published in 1994 - IPC

Abstract RU 2024534 C1

FIELD: organometallic chemistry. SUBSTANCE: product - bis-(trimethylsilyl)- aminotrialkoxygermanium of the formula (R)3GeN[Si(CH3)3]2 where R - lower alkyl. Method involves trimethylsilylamination of corresponding trialkoxygermanium-derivative of hexamethyldisilazane at 90-130 C at 1.5-4-fold excess from stoichiometry of hexamethyldisilazane following by distillation isolation of product reaction under atmospheric pressure firstly, and then under vacuum. Total time of process is 1.5-2 h. Synthesized product is used in semiconductive engineering. EFFECT: improved method of synthesis. 3 cl, 3 tbl

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RU 2 024 534 C1

Authors

Grinberg E.E.

Nozdrja S.M.

Nechaeva G.Ju.

Shmelev L.V.

Khangazheev S.Kh.

Dates

1994-12-15—Published

1991-12-04—Filed

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