APPARATUS FOR MEASURING THICKNESS OF FILMS OF MULTILAYER OPTICAL COATING DURING DEPOSITION IN VACUUM CHAMBER Russian patent published in 1994 - IPC

FIELD: measurement technology. SUBSTANCE: apparatus for measuring thickness of films of multilayer optical coating has a light source, optic system, spectral device with input and output slits, objective lens and two dispersing members, switch for switching monochromatic flows and photodetection system. The monochromatic flow switch is made in the form of a mirror attached to a shaft of a stepping motor and is mounted in the spectral device and capable of alternatively coupling the objective lens of spectral device with two channels in each of which an adjustable diaphragm, filter cutting off non- working orders and dispersing member are sequentially situated. The filter is located at an angle to the channel axis. Dispersion planes of both dispersing members coincide, the spectral device output slit being an extension of its input slit. EFFECT: enhanced accuracy. 3 dwg