DEVICE FOR PULSE PROCESSING OF SEMICONDUCTOR PLATES Russian patent published in 1995 - IPC

FIELD: microelectronics. SUBSTANCE: device has radiator power source, plates temperature set-point device, commutator, switch, temperature transducer, amplifier, constant voltage high-voltage source, working chamber provided with non-coherent radiation irradiator, electrodes and holders for semiconductor plates. The chamber is mounted above the radiators. Water-cooled chamber is separated from the irradiators by quartz partition. There is an ultraviolet lamp in the chamber. The former is connected with voltage source through duration set-point device. Device also has additional alternating voltage power source connected with electrodes. EFFECT: improved efficiency. 1 dwg