METHOD OF TUNING THIN-FILM PRESSURE TRANSDUCER Russian patent published in 1995 - IPC

FIELD: measurement technology. SUBSTANCE: pressure transducer has membrane with isolation layer 2. There are two resistance strain gauges 1-4 and two compensation resistors 9 and 15 on the layer. Resistors 9 and 15 are disposed at intermediate temperature field and temperature deformation field in relation to maximal and minimal changes. Coefficient of tensity sensitive effect of some compensation resistor is higher than corresponding coefficient of the resistor strain gauge. Coefficient of tensity sensitivity effect of the other compensation resistor is lower than corresponding coefficient of the resistor strain gauge. To tune the detector, resistors 15 and 9 are completely shorted out and desired resistances of tensity-sensitive and thermosensitive resistors are measured from the specific relations. EFFECT: improved precision of measurement. 2 cl, 10 dwg