FIELD: measuring equipment. SUBSTANCE: resistance strain gauge is provided with metallic diaphragm 4 coated with dielectric 5. Spaces, formed as cylinder 9 at the center of the diaphragm and concentric rings 10, are made inside the diaphragm symmetrically to its surface. The sizes of the spaces are defined by a relationship presented in the invention description. The distance between the spaces can increase from the center of the diaphragm to its periphery. EFFECT: enhanced accuracy. 2 cl, 5 dwg
Title | Year | Author | Number |
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PRESSURE TRANSDUCER | 1984 |
|
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THIN-FILM PRESSURE TRANSDUCER | 1987 |
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THIN-FILM PRESSURE TRANSDUCER | 1987 |
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PRESSURE TRANSDUCER | 1984 |
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THIN-FILM PRESSURE GAUGE | 1988 |
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Authors
Dates
1995-04-30—Published
1987-03-27—Filed