FIELD: measurement technology. SUBSTANCE: pressure transducer has housing 1, cap flexible member 2 coated with two-layer dielectric 3 and tensoresistive circuit 4 arranged on dielectric. Additional film 7 is provided which is arranged on flexible member at side opposite to two-layer dielectric. Thermal conductivity of film is less than that of material of flexible member. Thickness of film 7 is found from definite equation. EFFECT: increased accuracy of measurement. 1 dwg
Title | Year | Author | Number |
---|---|---|---|
PRESSURE GAUGE | 1985 |
|
RU2026537C1 |
PRESSURE TRANSDUCER | 1984 |
|
RU2024829C1 |
THIN-FILM PRESSURE TRANSDUCER | 1987 |
|
RU2028588C1 |
METHOD OF MANUFACTURE OF PRESSURE TRANSDUCER | 1987 |
|
RU2028586C1 |
PRESSURE TRANSDUCER | 1986 |
|
RU2028585C1 |
PRESSURE GAUGE | 1987 |
|
RU2034252C1 |
THIN-FILM PRESSURE GAUGE | 1988 |
|
RU2034253C1 |
METHOD OF TUNING THIN-FILM PRESSURE TRANSDUCER | 1985 |
|
RU2028584C1 |
THIN-FILM PRESSURE TRANSDUCER | 1987 |
|
RU2041452C1 |
PRESSURE GAUGE | 1985 |
|
RU2034251C1 |
Authors
Dates
1995-02-09—Published
1984-10-02—Filed