FIELD: digital polarization technique. SUBSTANCE: method involves interpreting each element of illuminated field of a microobject by spatial distributions such as refraction index, physical height, flat angles. The method is characterized in that in a far diffraction zone superresolution effect is realized due to simultaneously measuring parameters of polarization, amplitudes and phases at coherent monochromatic illumination. EFFECT: enhanced resolution. 2 cl, 5 dwg
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Authors
Dates
1995-02-27—Published
1994-05-23—Filed