FIELD: physics.
SUBSTANCE: imaging microellipsometer consists of a coherent light source 1, a spatial filter 2, a controlled half-wave plate 3, a collimator 4, a non-polarising beam splitter 5, at least one trap-absorber 6, a microlens 7 with a frontal lens 8, an object table 9 placed under the microlens, with an object 10 placed on said object table, an image forming interference unit 11. The beam reflected from the object 10 is deflected by the beam splitter 5 to the input of the image forming interference unit 11.
EFFECT: higher accuracy of determining polarisation parameters of light scattered by an object, and eliminating the effect of surface geometry on accuracy of determination.
9 cl, 2 dwg
| Title | Year | Author | Number |
|---|---|---|---|
| METHOD FOR DETERMINATION OF OBJECT MICRORELIEF AND OPTICAL PROPERTIES OF PRESURFACE LAYER, MODULATION INTERFERENCE MICROSCOPE FOR REALIZATION OF THE METHOD | 2001 |
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| METHOD AND OPTIC POLARIZATION NANOSCOPE FOR VISUALIZATION OF MICROCONTRAST OBJECTS | 1994 |
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| DEVICE FOR RECORDING AND OBSERVING OBJECTS | 0 |
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SU1659960A1 |
