LASER DEVICE TO EXAMINE FIELD OF MICROOBJECTS BY BEAM ACTION (VERSIONS) Russian patent published in 2003 - IPC

FIELD: measurement technology. SUBSTANCE: invention deals with aids acting on organic and inorganic materials and can find use in various fields of science and technology from machining of parts in micromechanics and microelectronics to photolithography, medicine, chemistry, biotechnology and gene engineering. According to first variant device includes laser with power supply unit and placed in series collimator, compensator for beam depolarization, two-coordinate acoustooptical deflector, lens aligning beam with field of microobjects, channels receiving scattered and initiated radiation with their objectives, laser operation mode transducer, device synchronization unit, control unit, single-coordinate acoustooptical deflector in channel receiving initiated radiation, marking optical channel, computer. Receiving channels include multielement receivers-CCD matrixes which operation is synchronized with operation of acoustooptical defector. In correspondence with second variant device includes laser, multielement radiation receiver in the for of CCD matrix and fiber-optical bundle with transceiving face surface and bundles of light guides of illumination and receiving channels. Ahead of butt of bundle of illumination light guides in path of laser beam there are mounted additionally collimator, two-coordinate acoustooptical deflector and objective, unit controlling operation of this deflector is synchronized via controller with receiver. Device enables parameters of scattered and initiated radiation of microobjects to be measured in wide spectrum of optical range with spectrum and coordinate referencing of microobjects, precision processing of field of microobjects by laser action to be carried out. EFFECT: enhanced operation speed and accuracy with generation of image of field of microobjects, analysis of its spectrum under beam action on microobjects. 12 cl, 3 dwg