LASER PROJECTION DEVICE FOR SHAPING IMAGE OF INTEGRATED CIRCUIT TOPOLOGY Russian patent published in 1995 - IPC

FIELD: microelectronics. SUBSTANCE: known device has auxiliary optic phase light modulator, optic divider and photodetector array, illumination system. The optic phase light modulator is interposed between the laser and illumination system. The optic divider is situated such that at its one output a projection system is disposed and at the other output the photodetector array is disposed. The photodetector array is electrically connected to the optic light modulator array. The optic phase light modulator prevents coherent noise on pixels and standing wave in a photoresist layer. The photodetector array equalizes transmission coefficients of the elements of optic light modulator array. The optic divider permits to match spatially the optic light modulator array with the photodetector one. EFFECT: enhanced accuracy. 1 dwg