FIELD: microelectronics. SUBSTANCE: apparatus has auxiliary discharger, which prevents mechanical and thermal contact between massive conductor of high-voltage impulse source and film discharger applied to tool surface. First discharger is made double-layer. Material of the first layer has maximum electroerosion resistance at direct polarity of discharge and material of the second layer at reverse polarity of discharge. Second discharger is made annular and positioned concentrically with respect to first discharger. EFFECT: increased efficiency simplified construction and enhanced reliability in operation. 3 cl, 1 dwg
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Authors
Dates
1995-09-20—Published
1990-11-01—Filed