FIELD: measurement technology. SUBSTANCE: invention is intended for control of moisture concentration in gas-and-air mixtures and their flows. Fast-action technological humidity sensor on surface acoustic waves has self-excited amplifier and sorption SAW resonator sensitive element manufactured on monocrystalline backing and including thin-film metal strip structure. In SAW resonator sensitive element backing is produced from quartz, thin-film structure of reflectors and converters is fabricated with vanadium boundary layer. Its thickness is chosen of order of known thickness of adhesive vanadium layer. High-sorption film of known composition of minimal thickness within bounds of monomolecular one can be deposited on working surface of backing under laminar thin-film structure. EFFECT: increased speed of action, improved adaptability to manufacture. 2 cl, 1 dwg
| Title | Year | Author | Number |
|---|---|---|---|
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|
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|
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