SENSOR BASED ON SURFACE ACOUSTIC WAVES TO MEASURE CONCENTRATION OF CARBON DIOXIDE Russian patent published in 2015 - IPC G01D5/00 B82B1/00 

FIELD: measurement equipment.

SUBSTANCE: sensor comprises a tight body, inside of which there is a piezoelectric acoustic line, on the working surface of which there is a transceiving interdigital transducer (IDT), loaded to an antenna, which is arranged outside the tight body, a support reflecting IDT and a reflecting IDT loaded to impedance located outside the tight body, the value of which is sensitive to the measured value, and an acoustic absorber applied at the ends of the acoustic line. The impedance is made in the form of a lattice of parallel connected nanorods of zinc oxide.

EFFECT: provision of maximum sensitivity of a sensor to concentration of carbon monoxide due to usage of zinc oxide rods as impedance depending on carbon monoxide concentration, with resistance close to resistance of radiation of a reflecting IDT.

2 dwg