PROCESS FOR MANUFACTURING ARTICLES FROM PYROLYTIC BORON NITRIDE Russian patent published in 1996 - IPC

Abstract RU 2061113 C1

FIELD: manufacture of superpure metal melts and also manufacture of semiconducting compounds and special alloys. SUBSTANCE: articles from pyrolytic boron nitride are manufactured by chemical gas-phase precipitation method. The latter comprises separately feeding boron halogenide and ammonia onto graphite substrate heated by high frequency field. Reactants being fed are previously heated to temperatures from 100 to 200 C higher than the substate temperature. The process makes it possible to improve ecological purity of the reaction due to greater coefficient of using chloride up to 70-90 %. EFFECT: improved quality of manufactured articles. 1 cl, 1 ex

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RU 2 061 113 C1

Authors

Ganin Ju.V.

Dernovskij V.I.

Dates

1996-05-27Published

1993-12-16Filed