FIELD: devices for flash evaporation with resistance heating for evaporation of metals. SUBSTANCE: device for flash evaporation under conditions of repeating thermal cycles, particularly, evaporating boat has graphite body with hollow to receive evaporated material, external coating of pyrolytic boron nitride. In this case, located between coating of pyrolytic boron nitride and graphite body is, at least, one intermediate layer made of material selected from series containing pyrolytic graphite, boron carbide ((B4C)), tantalum carbide and silicon carbide. Maximum thickness of layer equals 0.0508 mm. EFFECT: increased service life of device. 4 cl, 2 dwg
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Authors
Dates
1999-09-10—Published
1995-09-18—Filed