FIELD: application of wear- resistant coatings to various products in mechanical engineering. SUBSTANCE: products are placed into chamber where the flux of high- energy neutral particles is created to treat the products successively with the particle energy of 2.5-5.0 keV for 1-2 min, particle energy of 1.5-2.0 keV for 1-2 min with energy of 700-800 eV for 2-3 min. Then, applied to product is bias voltage, arc discharge is initiated for cathode evaporation for product heating and cleaning. After supply of reagent gas and reduction of bias voltage, coating is formed. Bias voltage is removed and products are treated with particles possessing energy of 700-800 eV for 2-3 min, with energy of 1.1-1.5 keV for 1-2 min, and with energy of 2.0-2.5 keV for 1-2 min. Then, gas supply is discontinued and products are cooled. EFFECT: higher efficiency.
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Authors
Dates
1996-06-10—Published
1993-03-09—Filed