METHOD OF APPLYING COATINGS ON ARTICLES MADE FROM MATERIALS INTENSELY OXIDISED IN AIR, AND PLANT FOR ITS IMPLEMENTATION Russian patent published in 2019 - IPC C23C14/30 C23C14/56 

FIELD: machine building.

SUBSTANCE: invention can be used for application of functional and protective metal coatings, namely Cu, Ti, Zn, Nb, Mo, W, Sn, Cr, V, Cd, Zr, and can be used in machine building industry. Method of applying metal coating on items made from material that is highly oxidized in air in working chamber combined with glove box includes providing inert gas in glove box, loading articles into working chamber, vacuumizing working chamber and applying metal coating by physical deposition from gas phase. After working chamber vacuumizing, oxygen leaks into it, then ion-beam cleaning of the articles is carried out with low-energy inert gas ions, the articles are moved into a glove box and the complete purity of the articles is controlled therein. Then, the products are repeatedly loaded into the working chamber, evacuated, the oxygen leaks therein and the articles are treated with high-energy inert gas ions. Then, said coating is applied on articles using electron-beam evaporation system. Plant for application of metal coating on articles from material, which is highly oxidized in air atmosphere, comprises working chamber combined with glove box, in which evaporation device is installed for application of coating by physical deposition from gas phase and substrate holder. Said plant is equipped with ion-beam device installed in working chamber for cleaning of items with low-energy ions and system of articles movement and rotation providing for movement of items from working chamber into glove box and back. Evaporation device placed in the working chamber is in form of a system of electron-beam evaporation.

EFFECT: higher strength of adhesion of coating with article.

2 cl, 2 dwg