PROCESS OF COAT DEPOSITION IN VACUUM Russian patent published in 1998 - IPC

FIELD: deposition of coats on cutting tool manufactured from steel, hard alloys and ceramic materials. SUBSTANCE: polyfunctional monomer is deposited on surface of article before placement of it in vacuum chamber, bias voltage is fed to article and working is carried out by flux of ions evaporated by discharge of cathode material at stage of heating. Coat is condensed in atmosphere of gas reagent. Condensation of coat is performed under pressure (2-3)•10^-3 mmHg in the course of 1/3 of total condensation time with current of focusing plasma- optical system reaching 0.5-0.6 A. After this pressure is decreased to (3-6)•10^-4 mmHg with simultaneous drop of current to 0.2-0.3A and condensation is continued in the course of 2/3 of total condensation time. Finally evaporation of cathode material is stopped, pressure of gas-reagent is increased to (2-5)•10^-2 mmHg and article is kept in vacuum chamber for 3-5 min. After lapse of this time article is unloaded from chamber. EFFECT: improved quality of coats. 2 tbl