MULTILAYER PIEZOELECTRIC DEFORMED BIMORPHOUS MIRROR Russian patent published in 1996 - IPC

FIELD: optical systems and devices. SUBSTANCE: multilayer piezoelectric deformed bimorphous mirror is used for static and dynamic control of wave-front. Deformed mirror has case in form of a cup with a cap and reflecting surface at outer side of bottom of the cup. Cup has a variable thickness. Piezoelectric element is made of at least two piezoelectric plates with electrodes disposed at opposite sides of the plates. Plates are arranged sequentially in parallel to internal surface of bottom of the cup. Vectors of polarization of adjacent plates are directed to opposite sides. Like electrodes are connected together. The cup is made in form of integral item. Reflecting surface is made at middle part of the bottom, which part has larger thickness. EFFECT: improved efficiency of control. 4 cl, 1 dwg