FIELD: optical engineering. SUBSTANCE: deformable mirror has two rigidly interconnected piezoelectric elements secured in body. They are made multilayer and formed by at least two identical piezoplates (piezofilms, piezolayers) with solid metal electrodes on opposite sides. Polarization vectors of adjacent piezoplates in every piezoelectric element have opposite directions, and their similar electrodes are interconnected electrically. Piezoelectric elements are connected to each other so that polarization vectors of adjacent piezoplates are directed to one side, and their adjacent conjugated electrodes are interconnected electrically. EFFECT: more reliable control. 3 cl, 4 dwg
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Authors
Dates
1997-12-20—Published
1996-10-17—Filed