FIELD: measurement technology. SUBSTANCE: differential transducer of liquid pressure has sensitive diaphragm module placed between two side supporting elements with holes to feed measured pressure. Module may be manufactured of one or two diaphragm elements. In absence of measured pressure both surfaces of diaphragm module are concave and under limiting pressure corresponding side of module becomes flat and presses against one of supporting plates which protects module from destruction by high pressure. Process of manufacture of sensitive element of transducer provides for polishing of corresponding surface of module under action of maximum pressure till flat surface is obtained. After removal of pressure this polished surface becomes concave. In similar way the other side of module is polished if module is made of two diaphragm elements joined in one unit by means of solidifying material. EFFECT: facilitated manufacture of sensitive element, increased operational reliability of differential transducer. 9 cl, 16 dwg
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Authors
Dates
1996-11-20—Published
1987-06-12—Filed