PRESSURE TRANSDUCER Russian patent published in 1999 - IPC

FIELD: measurement technology. SUBSTANCE: invention refers to pressure transducers with protection of fragile membrane against excessive pressure. Pressure transducer includes substrate of fragile material and membrane assembly anchored on substrate and tightly joined to substrate over periphery. Central part of membrane sags towards substrate with feed of pressure. Sagging of membrane is sensed by strain-gauge transducers which determine pressure. Membrane has assemblage of individual supporting posts made as unit together with membrane on side facing substrate. With high excessive pressures membrane sags towards substrate and supporting posts keep membrane from displacement to prevent failure or breakdown of membrane. Number of supporting posts can vary and be four or sixteen, for example. Thin layer of silicon dioxide can be deposited on substrate to compensate for small translation of supporting posts to diminish stress emerging in membrane with growth of excessive pressure. EFFECT: provision for reliable protection of membrane against breakdown under action of excessive pressure. 6 cl, 6 dwg