FIELD: microscopes of passing and reflecting light to measure, examine and photograph especially thin structures in light and dark fields under conditions of industrial production of microelectronic articles. SUBSTANCE: objective microlens includes five components of which first two are positive lenses, third one is cemented from negative and positive lenses with positive lens facing space of objects, fourth component is positive singular lens made in the form of meniscus facing space of image with concavity, fifth component is negative one made of two lenses with meniscus-shaped lens facing space of objects with concavity. EFFECT: expanded application field. 1 dwg
| Title | Year | Author | Number |
|---|---|---|---|
| SMALL-SIZE LENS WITH INCREASED FOCAL LENGTH | 1992 |
|
RU2104575C1 |
| ACHROMATIC HIGH-APERTURE MICROOBJECTIVE OF LARGE MAGNIFICATION | 1993 |
|
RU2084939C1 |
| HIGH-APERTURE APOCHROMATIC SMALL-SIZE LENS | 1996 |
|
RU2104576C1 |
| REFLEX-FREE NON-IMMERSION PLANO-APOCHROMATIC HIGH-APERTURE MICROLENS OF LARGE MAGNIFICATION | 1997 |
|
RU2176806C2 |
| PLANOAPOCHROMATIC MICROLENS | 1996 |
|
RU2098853C1 |
| PLANAPOCHROMATIC FAST MICROSCOPE OBJECTIVE | 1994 |
|
RU2082196C1 |
| MICROOBJECTIVE WITH INCREASED OPERATING DISTANCE | 1993 |
|
RU2097810C1 |
| HIGH-SPEED IMMERSION MICROOBJECTIVE LENS OF MEDIUM MAGNIFICATION | 1993 |
|
RU2084938C1 |
| ACHROMATIC HIGH-SPEED OBJECTIVE LENS OF MICROSCOPE | 1993 |
|
RU2084937C1 |
| MICROOBJECTIVE LENS WITH INCREASED WORKING DISTANCE | 1999 |
|
RU2187136C2 |
